In the fab, contamination is not an option. SMD clamp-on flow, bubble, and level sensors deliver process-critical measurements without ever touching the fluid — protecting purity from bulk storage to point-of-use.
Sensor Families
Ranked by relevance to semiconductor applications based on application requirements and customer specifications.
Precision flow verification for chemical delivery systems and process fluid monitoring. Non-contact clamp-on design eliminates contamination risk in ultra-pure chemical lines.
Real-time air and bubble event detection in chemical delivery and wet process fluid lines. Critical for process integrity and preventing tool damage from gas slugs.
Thin film load cells for wafer handling, robotic arm force feedback, and precision positioning systems in automated fab equipment.
Thin film pressure sensors for process fluid monitoring, chemical tank pressure, and line pressure verification across wet process tool networks.
Non-contact ultrasonic and capacitive level sensors for chemical reservoir monitoring and reagent vessel level indication.
Applications
Monitor ultra-pure chemical flow from bulk storage through point-of-use delivery. Clamp-on sensors maintain chemical purity while delivering ±0.5% flow accuracy.
Sensors embedded in spin-rinse-dry, CMP slurry delivery, and wet etch systems provide real-time process fluid control without contamination risk.
Detect air slugs, micro-bubbles, and fluid transitions in chemical lines before they reach the process chamber — preventing costly wafer defects.
External non-contact level sensing for chemical cabinets, day tanks, and bulk chemical storage vessels across the fab.
Miniature load cells provide force feedback in wafer handling robots, ensuring correct grip force and preventing wafer breakage.
Independent flow verification for critical dosing steps — photoresist, developer, and etchant dispensing where recipe accuracy drives yield.
Our applications engineers understand semiconductor process requirements. We'll work with your team from initial specification through qualification and production ramp.